JPH071792Y2 - ウエーハ貼付装置 - Google Patents

ウエーハ貼付装置

Info

Publication number
JPH071792Y2
JPH071792Y2 JP1990046843U JP4684390U JPH071792Y2 JP H071792 Y2 JPH071792 Y2 JP H071792Y2 JP 1990046843 U JP1990046843 U JP 1990046843U JP 4684390 U JP4684390 U JP 4684390U JP H071792 Y2 JPH071792 Y2 JP H071792Y2
Authority
JP
Japan
Prior art keywords
wafer
centering
carrier
adhesive
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990046843U
Other languages
English (en)
Japanese (ja)
Other versions
JPH045634U (en]
Inventor
通弘 橋爪
憲善 横須賀
Original Assignee
株式会社エンヤシステム
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エンヤシステム filed Critical 株式会社エンヤシステム
Priority to JP1990046843U priority Critical patent/JPH071792Y2/ja
Publication of JPH045634U publication Critical patent/JPH045634U/ja
Application granted granted Critical
Publication of JPH071792Y2 publication Critical patent/JPH071792Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP1990046843U 1990-05-07 1990-05-07 ウエーハ貼付装置 Expired - Lifetime JPH071792Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990046843U JPH071792Y2 (ja) 1990-05-07 1990-05-07 ウエーハ貼付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990046843U JPH071792Y2 (ja) 1990-05-07 1990-05-07 ウエーハ貼付装置

Publications (2)

Publication Number Publication Date
JPH045634U JPH045634U (en]) 1992-01-20
JPH071792Y2 true JPH071792Y2 (ja) 1995-01-18

Family

ID=31562264

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990046843U Expired - Lifetime JPH071792Y2 (ja) 1990-05-07 1990-05-07 ウエーハ貼付装置

Country Status (1)

Country Link
JP (1) JPH071792Y2 (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006032661A (ja) * 2004-07-16 2006-02-02 Disco Abrasive Syst Ltd 切削装置
JP5576173B2 (ja) * 2010-04-23 2014-08-20 芝浦メカトロニクス株式会社 半導体装置の製造装置
KR101383958B1 (ko) * 2013-01-18 2014-04-14 주식회사 엘지실트론 웨이퍼 마운팅 장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0732182B2 (ja) * 1986-07-29 1995-04-10 三井東圧化学株式会社 エピタキシヤル膜の評価方法
JPH084105B2 (ja) * 1987-06-19 1996-01-17 株式会社エンヤシステム ウェハ接着方法

Also Published As

Publication number Publication date
JPH045634U (en]) 1992-01-20

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